Items in Quote List

Get a Quote

Atomic Resolution Analytical Electron microscopy (AEM)

Atomic Resolution Analytical Electron microscopy Main Image
HAADF (High-Angle Annular Dark Field) STEM image of a MiM (Metal – Insulator – Metal) capacitor structure within an integrated circuit.

Several kinds of analytical techniques equipped with atomic resolution scanning transmission electron microscope (STEM) make it possible to investigate local structure and physical properties of the sample with sub nano-meter resolution.

Application areas: Semiconductor, Battery, Nanomaterials, Metal

Strengths

  • New type spherical aberration corrector achieves 53 pm spatial resolution in STEM imaging.
  • Energy dispersive X-ray spectroscopy (EDX) with large solid-angle detectors can get information of elemental composition with high sensitivity.
  • 0.3 eV energy resolution EEL spectra (EELS) accompanied by highly skilled spectrum processing enable detailed investigation of electronic structure and optical properties.
  • Precession electron diffraction pattern series, ACOM (automated crystal orientation mapping)-TEM, can acquire the lattice strain mapping in an actual electronic device.

Limitations

  • Thin lamella specimen preparation using ion-beam milling, which may cause sample damage but can be reduced by cryo-milling condition.
  • Elemental composition analysis only for main components with the detection limit of 0.1 atom%.

Learn More

Example Outputs Instruments Used How AEM Works

Sample Requirements

AEM Example Outputs

Example Output 1

Atomic resolution HAADF or OBF-STEM images of electron beam irradiation sensitive materials which cannot be acquired by conventional STEM.

Example Output 2

Atomic resolution EDX mapping at AlAs/AlGaAs interface.

Example Output 3

Low-loss EEL spectrum at semiconductor layer in a TFT device which show the band gap of the oxide semiconductor.

Example Output 4

Lattice strain mapping at Si/SiGe using ACOM-TEM technique

AEM Instruments Used

JEOL ARM200F

JEOL ARM200F

  • Accelerating voltage: 40-300 kV
  • Delta-type spherical aberration corrector for STEM
  • Segmented annular all field detectors for OBF (optimum bright field)-STEM imaging
  • Dual SDD-type EDX detectors with large window, 158 mm2
  • Gatan Continuum S for high-speed EELS detection
  • EDM (Electrostatic Dose Modulator) fast beam blanking system
JEOL ARM300F2

JEOL ARM300F2

  • Accelerating voltage: 200 kV
  • NanoMegas ASTAR for ACOM-TEM

How AEM Works

Local elemental composition distribution can be observed by energy dispersive X-ray spectroscopy (EDX) and electron energy-loss spectroscopy (EELS). Carefully acquired EEL spectra below 10 eV give us information about physical properties such as band gap and electronic structure. Electron diffraction pattern series can visualize the distribution of lattice strain. All the data are accompanied by excellent STEM images using the state-of-the-art image detectors.

Possible measurements:

STEM imaging: crystal structure, atomic arrangement even in e-beam irradiation sensitive fragile materials

EELS: elemental composition with better resolution than EDX, bonding structure, electronic structure, optical property

ACOM-TEM: crystal grain size and orientation, lattice strain

 

Learn more about using Atomic Resolution Analytical Electron microscopy services today!